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This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.

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The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.
MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

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Introduction.- Reliability /Weibull, bathtub curve, basics (What is reliability?).- Failure Modes and Physics of Failure (POF).- Strategies for identifying root cause (FMEA).- Manufacturing Processes & Procedures.- Testing & Qualification Processes & Procedures.- Improving Reliability: Techniques and Tools.- Design for Reliability (DFR).

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